Design and Simulation of MEMS Piezoelectric Cantilever Array for Fully Cochlear Implantable Sensor

Abstract

This paper presents the improving area-efficient MEMS (Micro-Electrical Mechanical System) piezoelectric cantilever array prototype for a fully cochlear implantable sensor. The proposed design consists of seventeen cantilevers in an array arrangement connected in parallel; the acoustic sound pressure level input considered to lies in between 60 and 94 dB SPL. Deflection of the beam is measured in the frequency range from 300 Hz to 3700 kHz and the prototype can be fixed in the ear-drum. The acoustic SPL level matches and resonates with the frequency of the cantilever beam which stimulates the auditory nerve via cochlea and sends the information to the brain. As a result, the proposed device shows the maximum electric potential voltage, displacement, and von Mises stress as obtained using simulation. This method makes viability to reduce environmental noise with a precision level of hearing and makes more comfort to the future generation for a deaf-mute person. The main aim of this proposed system is to provide an improving area-efficient MEMS (Micro-Electrical Mechanical System) piezoelectric cantilever array to obtain maximum electric potential voltage for a fully cochlear implantable sensor is focused in this work.